Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloChan, BTBTChanGronheid, RoelRoelGronheidvan der Veen, MarleenMarleenvan der VeenHeylen, NancyNancyHeylenVandersmissen, KevinKevinVandersmissenDemuynck, StevenStevenDemuynckBoemmels, JuergenJuergenBoemmels2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27218Defect characterization in templated DSA through electrical measurementsOral presentationhttps://spie.org/AL16/conferencedetails/alternative-lithographic-technologies