Comparison of the performance of slurries for STI processing

Detzel, T.T.DetzelHosali, S.S.HosaliSethuraman, A.A.SethuramanWang, J. F.J. F.WangCook, L.L.CookGrillaert, JoostJoostGrillaert2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1859Comparison of the performance of slurries for STI processingProceedings paper