Pattern collapse of high-aspect-ratio silicon nanostructures

Vrancken, NandiNandiVranckenVereecke, GuyGuyVereeckeBal, StefStefBalSergeant, StefanieStefanieSergeantDoumen, GeertGeertDoumenHolsteyns, FrankFrankHolsteynsTerryn, HermanHermanTerrynDe Gendt, StefanStefanDe GendtXu, XiuMeiXiuMeiXu2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27559Pattern collapse of high-aspect-ratio silicon nanostructures - A parametric studyProceedings paperhttp://www.scientific.net/SSP.255.136