Huck, ChristinaChristinaHuckPoghossian, ArxhakArxhakPoghossianKerroumi, ImanImanKerroumiSchusser, SebastianSebastianSchusserBäcker, MatthiasMatthiasBäckerZander, WilliWilliZanderSchubert, JurgenJurgenSchubertBunniatyan, Vahe V.Vahe V.BunniatyanMartirosyan, Norayrr W.Norayrr W.MartirosyanWagner, PatrickPatrickWagnerSchöning, Michael J.Michael J.Schöning2021-10-222021-10-2220141521-4109https://imec-publications.be/handle/20.500.12860/23973Multiparameter sensor chip with barium strontium titanate as multipurpose materialJournal article10.1002.elan.201.400076http://onlinelibrary.wiley.com/doi/10.1002/elan.201400076/abstract