300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility

Kljucar, LukaLukaKljucarSmets, QuentinQuentinSmetsvan Setten, MichielMichielvan SettenMitard, JeromeJeromeMitardBelmonte, AttilioAttilioBelmonteDekkers, HaroldHaroldDekkersTeugels, LieveLieveTeugelsMao, MingMingMaoPuliyalil, HarinarayananHarinarayananPuliyalildel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua BorniquelDelhougne, RomainRomainDelhougneSankaran, KiroubanandKiroubanandSankaranTokei, ZsoltZsoltTokei2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35397300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibilityProceedings paperhttps://confit.atlas.jp/guide/event/ssdm2020/subject/J-6-03/advanced