Krishtab, MikhailMikhailKrishtabWitters, ThomasThomasWittersDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26851Impact of PVD barrier deposition sequence on ultra low-k dielectricsMeeting abstract