Device engineering guidelines for performance boost in IGZO front gated TFTs based on defect control

Subhechha, SubhaliSubhaliSubhechhaRassoul, NouredineNouredineRassoulBelmonte, AttilioAttilioBelmonteHody, HubertHubertHodyDekkers, HaroldHaroldDekkersvan Setten, MichielMichielvan SettenVaisman Chasin, AdrianAdrianVaisman ChasinHoushmand Sharifi, ShaminShaminHoushmand SharifiBanerjee, KaustuvKaustuvBanerjeePuliyalil, HarinarayananHarinarayananPuliyalilKundu, SouvikSouvikKunduPak, MuratMuratPakTsvetanova, DianaDianaTsvetanovaBazzazian, NinaNinaBazzazianVandersmissen, KevinKevinVandersmissenBatuk, DmitryDmitryBatukGeypen, JefJefGeypenHeijlen, JeroenJeroenHeijlenDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKar2023-04-282023-03-252023-04-2820222381-3555WOS:000945920500030https://imec-publications.be/handle/20.500.12860/41363Device engineering guidelines for performance boost in IGZO front gated TFTs based on defect controlProceedings paper10.1109/ICICDT56182.2022.9933087978-1-6654-5901-3WOS:000945920500030