Leray, PhilippePhilippeLerayWong, PatrickPatrickWongHalder, SandipSandipHalderFoubert, PhilippePhilippeFoubert2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26891Current and future requirements for metrology and inspection for advanced patterningProceedings paperhttp://imnc.jp/invited2016.html