Surface cleaning issues in thin-oxide technology

Mertens, PaulPaulMertensBearda, TwanTwanBeardaHoussa, MichelMichelHoussaLoewenstein, LeeLeeLoewensteinTeerlinck, IvoIvoTeerlinckDe Gendt, StefanStefanDe GendtVos, RitaRitaVosKenis, KarineKarineKenisNaili, MohamedMohamedNailiHeyns, MarcMarcHeyns2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3673Surface cleaning issues in thin-oxide technologyOral presentation