Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bonding

Doppelbauer, DavidDavidDoppelbauerFloetgen, ChristophChristophFloetgenGabas, Ignacio Gabriel VicenteIgnacio Gabriel VicenteGabasIacovo, SerenaSerenaIacovoBrems, StevenStevenBremsBeyne, EricEricBeyneDuchoslav, JiriJiriDuchoslavGroiss, HeikoHeikoGroiss2025-04-162025-03-062025-04-162024979-8-3503-8518-22380-632XWOS:001411360600034https://imec-publications.be/handle/20.500.12860/45317Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bondingProceedings paper10.1109/IITC61274.2024.10732483979-8-3503-8517-5WOS:001411360600034