Electrical properties and noise of poly SiGe deposited at temperatures compatible with MEMS integration on top of standard CMOS

Sedky, SherifSherifSedky2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6815Electrical properties and noise of poly SiGe deposited at temperatures compatible with MEMS integration on top of standard CMOSProceedings paper