Jonckheere, RikRikJonckheereBaudemprez, BartBartBaudemprezWaehler, TobiasTobiasWaehlerVan Den Heuvel, DieterDieterVan Den HeuvelSchmalfuss, HeikoHeikoSchmalfussBrux, OliverOliverBruxDress, PeterPeterDressKappel, ChristopheChristopheKappelZickler, LeanderLeanderZickler2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20873Minimizing particle contamination of NXE3100 reticlesOral presentationwww.sematech.org/10258/