Diffraction gratings fabricated in DLC thin flms

Cirino, GiuseppeGiuseppeCirinoMansano, RonaldoRonaldoMansanoVerdonck, PatrickPatrickVerdonckJasinevicius, R.G.R.G.JasineviciusGoncalves Neto, LuizLuizGoncalves Neto2021-10-182021-10-1820100257-8972https://imec-publications.be/handle/20.500.12860/16872Diffraction gratings fabricated in DLC thin flmsJournal article