Richard, OlivierOlivierRichardDemuynck, StevenStevenDemuynckVeloso, AnabelaAnabelaVelosoVan Marcke, PatriciaPatriciaVan MarckeBender, HugoHugoBender2021-10-182021-10-1820101742-6588https://imec-publications.be/handle/20.500.12860/17880Characterization of a FinFET 6T-SRAM cell by tomographyJournal articlehttp://iopscience.iop.org/1742-6596/209/1/012047/pdf/1742-6596_209_1_012047.pdf