Chery, EmmanuelEmmanuelCheryDuval, FabriceFabriceDuvalStucchi, MicheleMicheleStucchiSlabbekoorn, JohnJohnSlabbekoornCroes, KristofKristofCroesBeyne, EricEricBeyne2022-03-312021-11-022021-11-082022-03-312020-06978-1-7281-6180-80569-5503WOS:000620983200185https://imec-publications.be/handle/20.500.12860/38147Photosensitive polymer reliability for fine pitch RDL applicationsProceedings paper10.1109/ECTC32862.2020.00197978-1-7281-6180-8WOS:000620983200185Materials scienceTHIN-FILMSRESISTANCEOXIDATIONFine pitch RDLphotosensitive polymerreliability3D packaging