De Gendt, StefanStefanDe GendtLux, MarcelMarcelLuxClaes, MartineMartineClaesJassal, A. S.A. S.JassalVan Hoeymissen, JanJanVan HoeymissenLagrange, SébastienSébastienLagrangeBergman, E.E.BergmanMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3353Evaluation of ozonated water spray for resist cleaning applicationsMeeting abstract