Influence of multiphysics couplings on the performance of a MEMS magnetometer

Ranvier, SylvainSylvainRanvierPaquay, StephaneStephanePaquayLamy, HervéHervéLamyRochus, VeroniqueVeroniqueRochusFrancis, LaurentLaurentFrancisRochus, PierrePierreRochus2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19669Influence of multiphysics couplings on the performance of a MEMS magnetometerProceedings paper