Rajagopal, A.A.RajagopalGrégoire, C.C.GrégoireLemaire, J. J.J. J.LemairePireaux, J. J.J. J.PireauxBaklanov, MikhaïlMikhaïlBaklanovVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaexWaeterloos, JoostJoostWaeterloos2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3768Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with CuJournal article