Titaniuim nitride growth by sputtering for contacts on boron doped diamond

Mortet, V.V.MortetElmazria, O.O.ElmazriaDeferme, W.W.DefermeDaenen, M.M.DaenenD'Haen, JanJanD'HaenLazea, A.A.LazeaMorel, A.A.MorelHaenen, KenKenHaenenD'Olieslaeger, MarcMarcD'Olieslaeger2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12598Titaniuim nitride growth by sputtering for contacts on boron doped diamondJournal article