Cho, Moon JuMoon JuChoKaczer, BenBenKaczerKauerauf, ThomasThomasKaueraufRagnarsson, Lars-AkeLars-AkeRagnarssonGroeseneken, GuidoGuidoGroeseneken2021-10-212021-10-2120130741-3106https://imec-publications.be/handle/20.500.12860/22145Improved NBTI reliability with sub 1-nanometer EOT ZrO2 compared to HfO2 gate dielectricJournal article