Characterization of nickel silicides using EELS-based methods

Verleysen, EvelineEvelineVerleysenBender, HugoHugoBenderRichard, OlivierOlivierRichardSchryvers, DominiqueDominiqueSchryversVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-1820101365-2818https://imec-publications.be/handle/20.500.12860/18279Characterization of nickel silicides using EELS-based methodsJournal article10.1111/j.1365-2818.2010.03391.x