Collaert, NadineNadineCollaertvon Arnim, KlausKlausvon ArnimRooyackers, RitaRitaRooyackersVandeweyer, TomTomVandeweyerMercha, AbdelkarimAbdelkarimMerchaParvais, BertrandBertrandParvaisWitters, LiesbethLiesbethWittersNackaerts, AxelAxelNackaertsAltamirano Sanchez, EfrainEfrainAltamirano SanchezDemand, MarcMarcDemandHikavyy, AndriyAndriyHikavyyDemuynck, StevenStevenDemuynckDevriendt, KatiaKatiaDevriendtBauer, F.F.BauerFerain, IsabelleIsabelleFerainVeloso, AnabelaAnabelaVelosoDe Meyer, KristinKristinDe MeyerBiesemans, SergeSergeBiesemansJurczak, GosiaGosiaJurczak2021-10-182021-10-182010-08https://imec-publications.be/handle/20.500.12860/16900Low-voltage scaled 6T FinFET SRAM cellsBook chapter