Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect Ratios

Stucchi, MicheleMicheleStucchiFodor, FerencFerencFodorMarinissen, Erik JanErik JanMarinissen2022-01-052021-11-022022-01-0520201530-1877WOS:000615974000019https://imec-publications.be/handle/20.500.12860/38202Accurate Measurements of Small Resistances in Vertical Interconnects with Small Aspect RatiosProceedings paper978-1-7281-4312-5WOS:000615974000019