Claes, MartineMartineClaesDe Gendt, StefanStefanDe GendtKenens, ConnyConnyKenensConard, ThierryThierryConardBender, HugoHugoBenderStorm, WolfgangWolfgangStormBauer, T.T.BauerLagrange, SébastienSébastienLagrangeMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5142A controlled deposition of organic contamination and the removal with ozone based cleaningProceedings paper