Su, JialeJialeSuVullers, RuudRuudVullersGoedbloed, MartijnMartijnGoedbloedvan Andel, YvonneYvonnevan AndelPellens, RudyRudyPellensGui, C.Q.C.Q.GuiLeonov, VladimirVladimirLeonovWang, ZiyangZiyangWang2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12958Stepper lithography on large-topography microstructures for thermoelectric energy scavengersProceedings paper