Leunissen, PeterPeterLeunissenJonckheere, RikRikJonckheereHofmann, UliUliHofmannÜnal, NezihNezihÜnalKalus, ChristianChristianKalus2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9194Experimental and simulation comparison of electron beam proximity correctionJournal article