Dielectric pockets - a new concept of the junctions for deca- nanometric CMOS devices

Jurczak, GosiaGosiaJurczakSkotnicki, T.T.SkotnickiGwoziecki, R.R.GwozieckiPaoli, M.M.PaoliTormen, B.B.TormenRibot, P.P.RibotDutartre, D.D.DutartreMonfray, S.S.MonfrayGalvier, J.J.Galvier2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5385Dielectric pockets - a new concept of the junctions for deca- nanometric CMOS devicesJournal article