John, JoachimJoachimJohnZimmermann, LarsLarsZimmermannDe Moor, PietPietDe MoorVan Hoof, ChrisChrisVan Hoof2021-10-152021-10-152004-06https://imec-publications.be/handle/20.500.12860/9099High-density hybrid interconnect methodologiesJournal article