Mechanical Design of a 3D CMOS Compatible Microelectrode Array for Neural Interfacing

Weekers, BartBartWeekersHaouari, RachidRachidHaouariBraeken, DriesDriesBraekenRochus, VeroniqueVeroniqueRochus2022-01-182021-11-022022-01-182020naWOS:000618046600014https://imec-publications.be/handle/20.500.12860/38165Mechanical Design of a 3D CMOS Compatible Microelectrode Array for Neural InterfacingProceedings paper978-1-7281-6049-8WOS:000618046600014