Near-surface B/As profiling with SIMS: (in)solvable problems?

Vandervorst, WilfriedWilfriedVandervorstGeenen, LucLucGeenenHuyghebaert, CedricCedricHuyghebaertFruehauf, JensJensFruehaufBergmaier, A.A.BergmaierDollinger, G.G.DollingerVandenberg, J.A.J.A.Vandenberg2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8328Near-surface B/As profiling with SIMS: (in)solvable problems?Meeting abstract