A Parylene temporary packaging technique for MEMS wafer handling

Wen, L.L.WenWouters, K.K.WoutersCeyssens, F.F.CeyssensWitvrouw, AnnAnnWitvrouwPuers, BobBobPuers2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20144A Parylene temporary packaging technique for MEMS wafer handlingProceedings paperwww.sciencedirect.com