Vereecke, GuyGuyVereeckeRöhr, ErikaErikaRöhrCarter, RichardRichardCarterConard, ThierryThierryConardDe Witte, HildeHildeDe WitteHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5806Investigation of fluorine in dry ultrathin silicon oxidesJournal article