A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation

Lauerhaas, JeffJeffLauerhaasWu, Y.Y.WuBran, M.M.BranFraser, B.B.FraserBrause, E.E.BrauseNicolosi, T.T.Nicolosi2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7780A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitationProceedings paper