High-resolution electron spin resonance analysis of ion bombardment induced defects in advanced low-k insulators (k=2.0-2.5)

Afanasiev, ValeriValeriAfanasievNguyen, A.A.NguyenHoussa, M.M.HoussaStesmans, AndreAndreStesmansTokei, ZsoltZsoltTokeiBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-2120130003-6951https://imec-publications.be/handle/20.500.12860/21953High-resolution electron spin resonance analysis of ion bombardment induced defects in advanced low-k insulators (k=2.0-2.5)Journal articlehttp://apl.aip.org/resource/1/applab/v102/i17/p172908_s1