Li, ZilanZilanLiSchram, TomTomSchramPantisano, LuigiLuigiPantisanoStesmans, AndreAndreStesmansConard, ThierryThierryConardShamuilia, SheronSheronShamuiliaAfanasiev, ValeriValeriAfanasievAkheyar, AmalAmalAkheyarVan Elshocht, SvenSvenVan ElshochtBrunco, DavidDavidBruncoDeweerd, WimWimDeweerdNaoki, YamadaYamadaNaokiLehnen, PeerPeerLehnenDe Gendt, StefanStefanDe GendtDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12484Mechanism of O2-anneal induced Vfb shifts of Ru gated stacksJournal article