Improved MEMS based shunt switches for telecom applications

Rottenberg, XavierXavierRottenbergFiorini, PaoloPaoloFioriniNauwelaers, BartBartNauwelaersMertens, RobertRobertMertensDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmansGhannam, MoustafaMoustafaGhannam2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8091Improved MEMS based shunt switches for telecom applicationsProceedings paper