The role of TXRF in the introduction of high-k materials into IC processing

Hellin, DavidDavidHellinOnsia, BartBartOnsiaDelabie, AnneliesAnneliesDelabieDe Gendt, StefanStefanDe GendtVinckier, ChrisChrisVinckier2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9016The role of TXRF in the introduction of high-k materials into IC processingProceedings paper