Van Steenwinckel, DavidDavidVan SteenwinckelGronheid, RoelRoelGronheidLammers, J.H.J.H.LammersMyers, AlanAlanMyersVan Roey, FriedaFriedaVan RoeyWillems, PatrickPatrickWillems2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13101A novel method for characterizing resist performanceProceedings paper