3D site specific sample preparation and analysis of 3D devices (Finfets) by atom probe tomography

Kambham, Ajay KumarAjay KumarKambhamKumar, ArulArulKumarGilbert, MatthieuMatthieuGilbertVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/208973D site specific sample preparation and analysis of 3D devices (Finfets) by atom probe tomographyOral presentation