A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves Coupling

Zdru, I.I.ZdruNastase, C.C.NastaseHess, L. N.L. N.HessCiubotaru, FlorinFlorinCiubotaruNicoloiu, A.A.NicoloiuVasilache, D.D.VasilacheDekkers, M.M.DekkersGeilen, M.M.GeilenCiornei, C.C.CiorneiBoldeiu, G.G.BoldeiuDinescu, A.A.DinescuAdelmann, ChristophChristophAdelmannWeiler, M.M.WeilerPirro, P.P.PirroMueller, A.A.Mueller2022-11-092022-09-092022-11-0920220741-3106WOS:000845067200044https://imec-publications.be/handle/20.500.12860/40410A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves CouplingJournal article10.1109/LED.2022.3196101WOS:000845067200044GAN