Demonstration of lithography patterns using reflective e-beam direct write

Freed, ReginaReginaFreedSun, JeffJeffSunBrodie, Alan D.Alan D.BrodiePetric, PaulPaulPetricMcCord, Marc A.Marc A.McCordRonse, KurtKurtRonseHaspeslagh, LucLucHaspeslaghVereecke, BartBartVereecke2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18933Demonstration of lithography patterns using reflective e-beam direct writeProceedings paper