Dark current analysis in high-speed germanium p-i-n waveguide photodetectors

Chen, HongtaoHongtaoChenVerheyen, PeterPeterVerheyenDe Heyn, PeterPeterDe HeynLepage, GuyGuyLepageDe Coster, JeroenJeroenDe CosterBalakrishnan, SadhishkumarSadhishkumarBalakrishnanAbsil, PhilippePhilippeAbsilRoelkens, GuntherGuntherRoelkensVan Campenhout, JorisJorisVan Campenhout2021-10-232021-10-2320160021-8979https://imec-publications.be/handle/20.500.12860/26421Dark current analysis in high-speed germanium p-i-n waveguide photodetectorsJournal articlehttp://scitation.aip.org/content/aip/journal/jap/119/21/10.1063/1.4953147