Jourdan, NicolasNicolasJourdanKrishtab, MikhailMikhailKrishtabBaklanov, MikhaïlMikhaïlBaklanovMeersschaut, JohanJohanMeersschautWilson, ChrisChrisWilsonAblett, J.J.AblettFonda, E.E.FondaZhao, LarryLarryZhaoVan Elshocht, SvenSvenVan ElshochtTokei, ZsoltZsoltTokeiVancoille, EricEricVancoille2021-10-202021-10-2020121099-0062https://imec-publications.be/handle/20.500.12860/20880Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganeseJournal article