Comparative reliability investigation of different nitride based local charge trapping memory devices

Breuil, LaurentLaurentBreuilHaspeslagh, LucLucHaspeslaghBlomme, PieterPieterBlommeLorenzini, MartinoMartinoLorenziniWellekens, DirkDirkWellekensDe Vos, JoeriJoeriDe VosVan Houdt, JanJanVan Houdt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10150Comparative reliability investigation of different nitride based local charge trapping memory devicesProceedings paper