Gupta, AnshulAnshulGuptaKundu, ShreyaShreyaKunduTeugels, LieveLieveTeugelsBoemmels, JuergenJuergenBoemmelsAdelmann, ChristophChristophAdelmannHeylen, NancyNancyHeylenJamieson, GeraldineGeraldineJamiesonVarela Pedreira, OlallaOlallaVarela PedreiraCiofi, IvanIvanCiofiChava, BharaniBharaniChavaWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokei2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30823High-aspect-ratio ruthenium lnes for buried power railProceedings paper