Dual brush process for selective surface modification in graphoepitaxy directed self-assembly

Doise, JanJanDoiseChan, BTBTChanHori, MasafumiMasafumiHoriGronheid, RoelRoelGronheid2021-10-242021-10-2420171932-5150https://imec-publications.be/handle/20.500.12860/28266Dual brush process for selective surface modification in graphoepitaxy directed self-assemblyJournal articlehttps://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-16/issue-03/033503/Dual-brush