n+ doping of Ge by P or As implantation and flash-lamp annealing

Wündisch, C.C.WündischPosselt, M.M.PosseltAnwand, W.W.AnwandSchmidt, B.B.SchmidtGrötzschel, R.R.GrötzschelMücklich, A.A.MücklichSkorupa, W.W.SkorupaSimoen, EddyEddySimoenClarysse, TrudoTrudoClarysseSatta, AlessandraAlessandraSattaHortenbach, H.H.HortenbachMöller, A.A.MöllerPelzing, P.P.Pelzing2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14799n+ doping of Ge by P or As implantation and flash-lamp annealingMeeting abstract