5nm: has the time for a device change come?

Raghavan, PraveenPraveenRaghavanGarcia Bardon, MarieMarieGarcia BardonSchuddinck, PieterPieterSchuddinckJang, DoyoungDoyoungJangYakimets, DmitryDmitryYakimetsBaert, RogierRogierBaertDebacker, PeterPeterDebackerVerkest, DiederikDiederikVerkestThean, AaronAaronThean2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/271805nm: has the time for a device change come?Proceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7479213