Elmazria, O.O.ElmazriaMortet, V.V.MortetEl Hakiki, M.M.El HakikiNesladek, MilosMilosNesladekAlnot, P.P.Alnot2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7553High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamondJournal article