Two-dimensional WS2 nanoribbon deposition by conversion of pre-patterned amorphous silicon

Heyne, MarkusMarkusHeynede Marneffe, Jean-FrancoisJean-Francoisde MarneffeDelabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxRadu, IulianaIulianaRaduNeyts, Erik C.Erik C.NeytsHuyghebaert, CedricCedricHuyghebaertDe Gendt, StefanStefanDe Gendt2021-10-242021-10-242017-120957-4484https://imec-publications.be/handle/20.500.12860/28503Two-dimensional WS2 nanoribbon deposition by conversion of pre-patterned amorphous siliconJournal articlehttp://dx.doi.org/10.1088/1361-6528/aa510c